Article dans une revue avec comité de lecture

A new method for charge trapping measurement during electron beam irradiation : application to glass containing alkali ions and single-crystalline quartz
J. Phys. D : Appl. Phys. 37 2181 (2004).

par   Slim FAKHFAKH , N. Ghorbel , Omar JBARA , Sébastien RONDOT , D. Martin , Z. Fakhfakh , A. Kallel

Résumé :


The aim of this work is to study the electron irradn. behavior of an insulating material surface using a scanning electron microscope (SEM). The charging phenomena caused in two kinds of insulating materials (quartz and glass) by continuous electron irradn. have been obsd. The discharging phenomena following switching off of irradn. have also been studied. The trapped charge d. is detd. by using the so-called electrostatic influence method based on the measurement, during and after the irradn., of the influence and leakage currents using an arrangement adapted to the SEM. The exptl. results reveal that the behavior under irradn. of glass is entirely different from that of quartz. The trapped charges are found to be different, and the dependence of charging on the primary beam energy is discussed. The charging and discharging time consts. have been detd. accurately, and their evolution vs. the mean electron penetration depth is qual. explained. Moreover, the role of secondary electron emission in the regulation mechanism of charging is underlined.